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About MEMS
Thermal: Page 1 of 4
Process Hierarchy
Bonding
Clean
Consulting
Deposition
Doping
Etch
LIGA
Lift off
Lithography
Mask making
Metrology
Miscellaneous
Packaging
Polishing
Process technologies
Thermal
Anneal
Bake
Oxidation
Unique capabilities
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Process
Dry oxidation
Wet oxidation
Dry oxidation
Wet oxidation
Dry oxidation
Wet oxidation
Wet oxidation
Wet oxidation
Dry oxidation - Chlorinated
Dry oxidation - Standard
Wet oxidation
Dry oxidation (metal)
Dry oxidation (non-metal)
Wet oxidation (metal)
Wet oxidation (non-metal)
Dry oxidation
Forming gas anneal (N2/H2)
Nitrogen anneal
Wet oxidation
Dry oxidation
Results Page:
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