| Spectrophotometric film thickness measurement |
| Stylus profilometer step measurement |
| Stylus profilometer step measurement |
| Wafer curvature measurement |
| Wafer curvature measurement with stress calculation |
| Optical surface profilometry |
| Spectroscopic ellipsometry film thickness measurement |
| Stylus profilometer step measurement |
| Contact sheet resistivity measurement |
| Microscope inspection |
| Optical surface profilometry |
| SEM analysis |
| Spectrophotometric film thickness measurement |
| Spectroscopic ellipsometry film thickness measurement |
| Stylus profilometer step measurement |
| Wafer curvature measurement |
| Wafer curvature measurement with stress calculation |
| AES (Auger-electron spectroscopy) |
| AFM (Atomic force microscopy) |
| Capacitance-Voltage measurement |
